Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11204239 | Metrology method, target and substrate | Kaustuve Bhattacharyya, Christophe David Fouquet, Hendrik Jan Hidde Smilde, Maurits Van Der Schaar, Arie Jeffrey Den Boef +7 more | 2021-12-21 |
| 11123773 | Apparatus for and a method of removing contaminant particles from a component of an apparatus | Tim Peter Johan Gerard Maas, Bartolomeus Martinus Johannes Van Hout, Floris Zoethout | 2021-09-21 |