Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11187995 | Metrology using a plurality of metrology target measurement recipes | Youping Zhang, Maurits Van Der Schaar, Richard Johannes Franciscus Van Haren, Xing Lan Liu | 2021-11-30 |