Issued Patents 2021
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11086240 | Metrology sensor, lithographic apparatus and method for manufacturing devices | Sebastianus Adrianus GOORDEN, Duygu Akbulut, Alessandro Polo, Simon Reinaid Huisman | 2021-08-10 |
| 10996570 | Metrology method, patterning device, apparatus and computer program | Zili Zhou, Olger Victor Zwier, Patrick Warnaar, Maurits Van Der Schaar, Elliott Gerard McNamara +6 more | 2021-05-04 |
| 10996571 | Adjustment of a metrology apparatus or a measurement thereby based on a characteristic of a target measured | Robert John Socha, Arie Jeffrey Den Boef | 2021-05-04 |
| 10983445 | Method and apparatus for measuring a parameter of interest using image plane detection techniques | Zili Zhou, Gerbrand Van Der Zouw, Arie Jeffrey Den Boef, Markus Gerardus Martinus Maria Van Kraaij, Armand Eugene Albert Koolen +7 more | 2021-04-20 |
| 10935373 | Topography measurement system | — | 2021-03-02 |
| 10908514 | Metrology apparatus, lithographic system, and method of measuring a structure | Janneke Ravensbergen, Duygu Akbulut, Jin LIAN | 2021-02-02 |
| 10895452 | Metrology apparatus | Marinus Johannes Maria Van Dam, Arie Jeffrey Den Boef | 2021-01-19 |
| 10895812 | Metrology apparatus, lithographic system, and method of measuring a structure | Armand Eugene Albert Koolen | 2021-01-19 |