Issued Patents 2021
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11143970 | Method and apparatus for image analysis | Scott Anderson Middlebrooks, Adrianus Cornelis Matheus Koopman, Stefan Hunsche, Willem Marie Julia Marcel Coene | 2021-10-12 |
| 11119414 | Yield estimation and control | Scott Anderson Middlebrooks, Willem Coene, Frank Arnoldus Johannes Maria Driessen, Adrianus Cornelis Matheus Koopman | 2021-09-14 |
| 11067901 | Method and apparatus for image analysis | Scott Anderson Middlebrooks, Adrianus Cornelis Matheus Koopman, Maxim PISARENCO | 2021-07-20 |
| 11041816 | Methods and apparatus for calculating electromagnetic scattering properties of a structure and for reconstruction of approximate structures | Maxim PISARENCO, Frank Schneider, Martijn Constant Van Beurden | 2021-06-22 |
| 11022900 | Inspection apparatus and methods, substrates having metrology targets, lithographic system and device manufacturing method | Simon Gijsbert Josephus Mathijssen, Stefan Hunsche | 2021-06-01 |
| 10983445 | Method and apparatus for measuring a parameter of interest using image plane detection techniques | Nitesh Pandey, Zili Zhou, Gerbrand Van Der Zouw, Arie Jeffrey Den Boef, Armand Eugene Albert Koolen +7 more | 2021-04-20 |
| 10955353 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arie Jeffrey Den Boef, Arno Jan Bleeker, Youri Johannes Laurentius Maria Van Dommelen, Mircea Dusa, Antoine Gaston Marie Kiers +4 more | 2021-03-23 |