Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11131936 | Method of measuring variation, inspection system, computer program, and computer system | Scott Anderson Middlebrooks, Jan-Willem Gemmink | 2021-09-28 |
| 10955353 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arie Jeffrey Den Boef, Arno Jan Bleeker, Youri Johannes Laurentius Maria Van Dommelen, Mircea Dusa, Paul Frank Luehrmann +4 more | 2021-03-23 |