Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11131936 | Method of measuring variation, inspection system, computer program, and computer system | Antoine Gaston Marie Kiers, Scott Anderson Middlebrooks | 2021-09-28 |
| 11054754 | Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method | Frank Staals, Anton Bernhard Van Oosten, Yasri Yudhistira, Carlo Cornelis Maria Luijten, Bert Verstraeten | 2021-07-06 |