Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11054754 | Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method | Frank Staals, Anton Bernhard Van Oosten, Carlo Cornelis Maria Luijten, Bert Verstraeten, Jan-Willem Gemmink | 2021-07-06 |