Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11194258 | Method and apparatus for determining a fingerprint of a performance parameter | Léon Maria Albertus Van Der Logt, Bart Peter Bert Segers, Simon Hendrik Celine Van Gorp, Frank Staals | 2021-12-07 |
| 11054754 | Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method | Frank Staals, Anton Bernhard Van Oosten, Yasri Yudhistira, Bert Verstraeten, Jan-Willem Gemmink | 2021-07-06 |