Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11194258 | Method and apparatus for determining a fingerprint of a performance parameter | Léon Maria Albertus Van Der Logt, Simon Hendrik Celine Van Gorp, Carlo Cornelis Maria Luijten, Frank Staals | 2021-12-07 |
| 11067902 | Computational metrology | Patrick Warnaar, Patricius Aloysius Jacobus Tinnemans, Grzegorz Grzela, Everhardus Cornelis Mos, Wim Tjibbo Tel +2 more | 2021-07-20 |
| 10990018 | Computational metrology | Wim Tjibbo Tel, Everhardus Cornelis Mos, Emil Peter Schmitt-Weaver, Yichen Zhang, Petrus Gerardus Van Rhee +4 more | 2021-04-27 |
| 10895811 | Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method | Miguel GARCIA GRANDA, Elliott Gerard MC NAMARA, Pierre-Yves Guittet, Eric Brouwer | 2021-01-19 |