Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11175591 | Method of obtaining measurements, apparatus for performing a process step, and metrology apparatus | Hakki Ergün Cekli, Masashi Ishibashi, Wendy Johanna Martina Van De Ven, Willem Seine Christian Roelofs, Elliott Gerard McNamara +3 more | 2021-11-16 |
| 11022896 | Mark position determination method | Amir Bin Ismail, Kaustuve Bhattacharyya, Paul DERWIN | 2021-06-01 |
| 10990018 | Computational metrology | Wim Tjibbo Tel, Bart Peter Bert Segers, Everhardus Cornelis Mos, Yichen Zhang, Petrus Gerardus Van Rhee +4 more | 2021-04-27 |
| 10884345 | Calibration method for a lithographic apparatus | Jens Stäcker, Koenraad Remi André Maria Schreel, Roy Werkman | 2021-01-05 |