Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11150563 | Method of measuring a parameter of a patterning process, metrology apparatus, target | Sergei Sokolov, Sergey Tarabrin, Su-Ting CHENG, Armand Eugene Albert Koolen, Markus Franciscus Antonius Eurlings | 2021-10-19 |
| 10884345 | Calibration method for a lithographic apparatus | Emil Peter Schmitt-Weaver, Jens Stäcker, Roy Werkman | 2021-01-05 |