Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11181828 | Method of determining a value of a parameter of interest of a patterning process, device manufacturing method | Patrick Warnaar, Hilko Dirk Bos, Hendrik Jan Hidde Smilde, Mohammadreza Hajiahmadi, Lukasz Jerzy Macht +2 more | 2021-11-23 |
| 11150563 | Method of measuring a parameter of a patterning process, metrology apparatus, target | Sergey Tarabrin, Su-Ting CHENG, Armand Eugene Albert Koolen, Markus Franciscus Antonius Eurlings, Koenraad Remi André Maria Schreel | 2021-10-19 |
| 11022899 | Method of measuring a focus parameter relating to a structure formed using a lithographic process | Fahong Li | 2021-06-01 |