Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11181828 | Method of determining a value of a parameter of interest of a patterning process, device manufacturing method | Patrick Warnaar, Hilko Dirk Bos, Hendrik Jan Hidde Smilde, Mohammadreza Hajiahmadi, Karel Hendrik Wouter VAN DEN BOS +2 more | 2021-11-23 |
| 11022892 | Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method | Patrick Warnaar, Simon Philip Spencer Hastings, Alberto Da Costa Assafrao | 2021-06-01 |