Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11022892 | Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method | Patrick Warnaar, Simon Philip Spencer Hastings, Lukasz Jerzy Macht | 2021-06-01 |
| 11009345 | Metrology method, apparatus, and computer program to determine a representative sensitivity coefficient | Mohammadreza Hajiahmadi | 2021-05-18 |