Issued Patents 2021
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11181828 | Method of determining a value of a parameter of interest of a patterning process, device manufacturing method | Hilko Dirk Bos, Hendrik Jan Hidde Smilde, Mohammadreza Hajiahmadi, Lukasz Jerzy Macht, Karel Hendrik Wouter VAN DEN BOS +2 more | 2021-11-23 |
| 11125806 | Metrology apparatus and method for determining a characteristic of one or more structures on a substrate | Patricius Aloysius Jacobus Tinnemans, Vasco Tomas Tenner, Maurits Van Der Schaar | 2021-09-21 |
| 11067902 | Computational metrology | Patricius Aloysius Jacobus Tinnemans, Grzegorz Grzela, Everhardus Cornelis Mos, Wim Tjibbo Tel, Marinus Jochemsen +2 more | 2021-07-20 |
| 11022892 | Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method | Simon Philip Spencer Hastings, Alberto Da Costa Assafrao, Lukasz Jerzy Macht | 2021-06-01 |
| 11009343 | Metrology apparatus and method for determining a characteristic of one or more structures on a substrate | Patricius Aloysius Jacobus Tinnemans, Vasco Tomas Tenner, Arie Jeffrey Den Boef, Hugo Augustinus Joseph Cramer, Grzegorz Grzela +1 more | 2021-05-18 |
| 11003099 | Method and apparatus for design of a metrology target | Maurits Van Der Schaar, Murat Bozkurt, Stefan Cornelis Theodorus Van Der Sanden | 2021-05-11 |
| 10996570 | Metrology method, patterning device, apparatus and computer program | Zili Zhou, Nitesh Pandey, Olger Victor Zwier, Maurits Van Der Schaar, Elliott Gerard McNamara +6 more | 2021-05-04 |