Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11156923 | Lithographic method and lithographic apparatus | Hakki Ergün Cekli, Xing Lan Liu, Richard Johannes Franciscus Van Haren | 2021-10-26 |
| 11003099 | Method and apparatus for design of a metrology target | Maurits Van Der Schaar, Murat Bozkurt, Patrick Warnaar | 2021-05-11 |