Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11181828 | Method of determining a value of a parameter of interest of a patterning process, device manufacturing method | Patrick Warnaar, Hilko Dirk Bos, Hendrik Jan Hidde Smilde, Mohammadreza Hajiahmadi, Lukasz Jerzy Macht +2 more | 2021-11-23 |