Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11181828 | Method of determining a value of a parameter of interest of a patterning process, device manufacturing method | Patrick Warnaar, Hilko Dirk Bos, Hendrik Jan Hidde Smilde, Lukasz Jerzy Macht, Karel Hendrik Wouter VAN DEN BOS +2 more | 2021-11-23 |
| 11009345 | Metrology method, apparatus, and computer program to determine a representative sensitivity coefficient | Alberto Da Costa Assafrao | 2021-05-18 |
| 10990020 | Metrology parameter determination and metrology recipe selection | Narjes JAVAHERI, Olger Victor Zwier, Gonzalo Roberto Sanguinetti | 2021-04-27 |