Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11022897 | Method of determining information about a patterning process, method of reducing error in measurement data, method of calibrating a metrology process, method of selecting metrology targets | Joannes Jitse Venselaar, Anagnostis Tsiatmas, Samee Ur Rehman, Paul Christiaan Hinnen, Jean-Pierre Agnes Henricus Marie Vaessen +3 more | 2021-06-01 |
| 10990020 | Metrology parameter determination and metrology recipe selection | Narjes JAVAHERI, Mohammadreza Hajiahmadi, Olger Victor Zwier | 2021-04-27 |