Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10996570 | Metrology method, patterning device, apparatus and computer program | Zili Zhou, Nitesh Pandey, Patrick Warnaar, Maurits Van Der Schaar, Elliott Gerard McNamara +6 more | 2021-05-04 |
| 10990020 | Metrology parameter determination and metrology recipe selection | Narjes JAVAHERI, Mohammadreza Hajiahmadi, Gonzalo Roberto Sanguinetti | 2021-04-27 |