Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11042100 | Measurement apparatus and method of measuring a target | Jin LIAN, Duygu Akbulut, Sergey Tarabrin | 2021-06-22 |
| 10996570 | Metrology method, patterning device, apparatus and computer program | Nitesh Pandey, Olger Victor Zwier, Patrick Warnaar, Maurits Van Der Schaar, Elliott Gerard McNamara +6 more | 2021-05-04 |
| 10983445 | Method and apparatus for measuring a parameter of interest using image plane detection techniques | Nitesh Pandey, Gerbrand Van Der Zouw, Arie Jeffrey Den Boef, Markus Gerardus Martinus Maria Van Kraaij, Armand Eugene Albert Koolen +7 more | 2021-04-20 |