Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11099489 | Method of measuring a parameter of a lithographic process, metrology apparatus | Hugo Augustinus Joseph Cramer, Hilko Dirk Bos, Erik Johan Koop, Armand Eugene Albert Koolen, Han-Kwang Nienhuys +2 more | 2021-08-24 |
| 11042100 | Measurement apparatus and method of measuring a target | Zili Zhou, Duygu Akbulut, Sergey Tarabrin | 2021-06-22 |
| 10908514 | Metrology apparatus, lithographic system, and method of measuring a structure | Janneke Ravensbergen, Duygu Akbulut, Nitesh Pandey | 2021-02-02 |