Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11086240 | Metrology sensor, lithographic apparatus and method for manufacturing devices | Sebastianus Adrianus GOORDEN, Nitesh Pandey, Alessandro Polo, Simon Reinaid Huisman | 2021-08-10 |
| 11042100 | Measurement apparatus and method of measuring a target | Jin LIAN, Zili Zhou, Sergey Tarabrin | 2021-06-22 |
| 10908514 | Metrology apparatus, lithographic system, and method of measuring a structure | Janneke Ravensbergen, Nitesh Pandey, Jin LIAN | 2021-02-02 |