Issued Patents 2021
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11181835 | Metrology sensor, lithographic apparatus and method for manufacturing devices | Johannes Antonius Gerardus Akkermans, Simon Reinald HUISMAN, Tamer Elazhary | 2021-11-23 |
| 11175593 | Alignment sensor apparatus for process sensitivity compensation | Simon Reinald HUISMAN, Tamer Elazhary, Yuxiang Lin, Vu Quang TRAN, Justin Kreuzer +4 more | 2021-11-16 |
| 11086240 | Metrology sensor, lithographic apparatus and method for manufacturing devices | Nitesh Pandey, Duygu Akbulut, Alessandro Polo, Simon Reinaid Huisman | 2021-08-10 |
| 11042096 | Alignment measurement system | Stefan Michiel Witte, Alessandro Antoncecchi, Hao Zhang, Stephen EDWARD, Paulus Clemens Maria PLANKEN +3 more | 2021-06-22 |
| 11022902 | Sensor, lithographic apparatus, and device manufacturing method | Arie Jeffrey Den Boef, Patricius Aloysius Jacobus Tinnemans, Haico Victor Kok, William Peter Van Drent | 2021-06-01 |
| 10942461 | Alignment measurement system | Simon Reinald HUISMAN, Irwan Dani Setija | 2021-03-09 |