Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11175593 | Alignment sensor apparatus for process sensitivity compensation | Simon Reinald HUISMAN, Tamer Elazhary, Yuxiang Lin, Vu Quang TRAN, Sebastianus Adrianus GOORDEN +4 more | 2021-11-16 |
| 10908516 | Metrology tool and method of using the same | — | 2021-02-02 |