Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11181835 | Metrology sensor, lithographic apparatus and method for manufacturing devices | Sebastianus Adrianus GOORDEN, Johannes Antonius Gerardus Akkermans, Tamer Elazhary | 2021-11-23 |
| 11175593 | Alignment sensor apparatus for process sensitivity compensation | Tamer Elazhary, Yuxiang Lin, Vu Quang TRAN, Sebastianus Adrianus GOORDEN, Justin Kreuzer +4 more | 2021-11-16 |
| 11042096 | Alignment measurement system | Stefan Michiel Witte, Alessandro Antoncecchi, Hao Zhang, Stephen EDWARD, Paulus Clemens Maria PLANKEN +3 more | 2021-06-22 |
| 10942461 | Alignment measurement system | Sebastianus Adrianus GOORDEN, Irwan Dani Setija | 2021-03-09 |