Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11022902 | Sensor, lithographic apparatus, and device manufacturing method | Arie Jeffrey Den Boef, Patricius Aloysius Jacobus Tinnemans, William Peter Van Drent, Sebastianus Adrianus GOORDEN | 2021-06-01 |