Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11194256 | Optical diffraction component for suppressing at least one target wavelength by destructive interference | Heiko Feldmann, Valentin Jonatan Bolsinger, Jozef Petrus Henricus Benschop | 2021-12-07 |
| 11022902 | Sensor, lithographic apparatus, and device manufacturing method | Arie Jeffrey Den Boef, Patricius Aloysius Jacobus Tinnemans, Haico Victor Kok, Sebastianus Adrianus GOORDEN | 2021-06-01 |