Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11194256 | Optical diffraction component for suppressing at least one target wavelength by destructive interference | Valentin Jonatan Bolsinger, William Peter Van Drent, Jozef Petrus Henricus Benschop | 2021-12-07 |
| 10928332 | Inspection device for masks for semiconductor lithography and method | Holger Seitz, Thomas A. Zeuner | 2021-02-23 |