Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10928332 | Inspection device for masks for semiconductor lithography and method | Holger Seitz, Heiko Feldmann | 2021-02-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10928332 | Inspection device for masks for semiconductor lithography and method | Holger Seitz, Heiko Feldmann | 2021-02-23 |