Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11150563 | Method of measuring a parameter of a patterning process, metrology apparatus, target | Sergei Sokolov, Su-Ting CHENG, Armand Eugene Albert Koolen, Markus Franciscus Antonius Eurlings, Koenraad Remi André Maria Schreel | 2021-10-19 |
| 11042100 | Measurement apparatus and method of measuring a target | Jin LIAN, Zili Zhou, Duygu Akbulut | 2021-06-22 |