Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10908514 | Metrology apparatus, lithographic system, and method of measuring a structure | Duygu Akbulut, Nitesh Pandey, Jin LIAN | 2021-02-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10908514 | Metrology apparatus, lithographic system, and method of measuring a structure | Duygu Akbulut, Nitesh Pandey, Jin LIAN | 2021-02-02 |