Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11125806 | Metrology apparatus and method for determining a characteristic of one or more structures on a substrate | Patricius Aloysius Jacobus Tinnemans, Patrick Warnaar, Maurits Van Der Schaar | 2021-09-21 |
| 11119415 | Method of determining a characteristic of a structure, and metrology apparatus | Johannes F. de Boer, Arie Jeffrey Den Boef, Christos MESSINIS | 2021-09-14 |
| 11009343 | Metrology apparatus and method for determining a characteristic of one or more structures on a substrate | Patricius Aloysius Jacobus Tinnemans, Arie Jeffrey Den Boef, Hugo Augustinus Joseph Cramer, Patrick Warnaar, Grzegorz Grzela +1 more | 2021-05-18 |