Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11106141 | Optimizing a sequence of processes for manufacturing of product units | Jochem Sebastiaan Wildenberg, Erik Weber Jensen, Erik Johannes Maria Wallerbos, Cornelis Johannes Rijnierse, Bijoy Rajasekharan +2 more | 2021-08-31 |
| 11067902 | Computational metrology | Patrick Warnaar, Patricius Aloysius Jacobus Tinnemans, Grzegorz Grzela, Everhardus Cornelis Mos, Wim Tjibbo Tel +2 more | 2021-07-20 |
| 11048174 | Method of controlling a patterning process, lithographic apparatus, metrology apparatus lithographic cell and associated computer program | Michael Kubis, Richard S. Wise, Nader Shamma, Girish Dixit, Liesbeth REIJNEN +3 more | 2021-06-29 |
| 10962886 | Selection of measurement locations for patterning processes | Hans Van Der Laan, Wim Tjibbo Tel, Stefan Hunsche | 2021-03-30 |