Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11170072 | Method and apparatus for inspection and metrology | Everhardus Cornelis Mos, Velislava IGNATOVA, Erik Weber Jensen, Michael Kubis, Hubertus Johannes Gertrudus Simons +2 more | 2021-11-09 |
| 11106141 | Optimizing a sequence of processes for manufacturing of product units | Jochem Sebastiaan Wildenberg, Marinus Jochemsen, Erik Weber Jensen, Cornelis Johannes Rijnierse, Bijoy Rajasekharan +2 more | 2021-08-31 |
| 10928737 | Method for characterizing distortions in a lithographic process, lithographic apparatus, lithographic cell and computer program | Everhardus Cornelis Mos, Jochem Sebastiaan Wildenberg, Roy Werkman | 2021-02-23 |