Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10895811 | Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method | Miguel GARCIA GRANDA, Elliott Gerard MC NAMARA, Pierre-Yves Guittet, Bart Peter Bert Segers | 2021-01-19 |