Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11054754 | Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method | Frank Staals, Anton Bernhard Van Oosten, Yasri Yudhistira, Carlo Cornelis Maria Luijten, Jan-Willem Gemmink | 2021-07-06 |