Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11022900 | Inspection apparatus and methods, substrates having metrology targets, lithographic system and device manufacturing method | Stefan Hunsche, Markus Gerardus Martinus Maria Van Kraaij | 2021-06-01 |
| 10983361 | Methods of aligning a diffractive optical system and diffracting beams, diffractive optical element and apparatus | Sander Bas Roobol, Stefan Michael Bruno Bäumer | 2021-04-20 |
| 10942460 | Mark position determination method | Maikel Robert GOOSEN | 2021-03-09 |
| 10908513 | Metrology method and apparatus and computer program | Marc Johannes Noot, Kaustuve Bhattacharyya, Jinmoo Byun, Hyun-Su Kim, Won-Jae Jang +1 more | 2021-02-02 |