Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11094502 | Method and apparatus for inspection | Johannes Catharinus Hubertus Mulkens, Marinus Aart Van Den Brink, Jozef Petrus Henricus Benschop, Erwin Paul SMAKMAN, Tamara Druzhinina +1 more | 2021-08-17 |
| 11080459 | Computational wafer inspection | Christophe David Fouquet, Arie Jeffrey Den Boef, Johannes Catharinus Hubertus Mulkens, James Benedict Kavanagh, James Patrick Koonmen +1 more | 2021-08-03 |
| 10915689 | Method and apparatus to correct for patterning process error | Peter Ten Berge, Everhardus Cornelis Mos, Richard Johannes Franciscus Van Haren, Peter Hanzen Wardenier, Erik Weber Jensen +5 more | 2021-02-09 |