Peter Ten Berge

Issued Patents 2021

Patent #	Title	Co-Inventors	Date
11170072	Method and apparatus for inspection and metrology	Everhardus Cornelis Mos, Velislava IGNATOVA, Erik Weber Jensen, Michael Kubis, Hubertus Johannes Gertrudus Simons +2 more	2021-11-09
11086229	Method to predict yield of a device manufacturing process	Alexander Ypma, Cyrus E. Tabery, Simon Hendrik Celine Van Gorp, Chenxi Lin, Dag Sonntag +9 more	2021-08-10
11036146	Method and apparatus to reduce effects of nonlinear behavior	Richard Johannes Franciscus Van Haren, Everhardus Cornelis Mos, Peter Hanzen Wardenier, Erik Weber Jensen, Hakki Ergün Cekli	2021-06-15
10996176	Methods and apparatus for measuring a property of a substrate	Wouter Lodewijk Elings, Franciscus Bernardus Maria Van Bilsen, Christianus Gerardus Maria De Mol, Everhardus Cornelis Mos, Hoite Pieter Theodoor Tolsma +5 more	2021-05-04
10996573	Method and system for increasing accuracy of pattern positioning	David Deckers, Peter Hanzen Wardenier	2021-05-04
10915689	Method and apparatus to correct for patterning process error	Everhardus Cornelis Mos, Richard Johannes Franciscus Van Haren, Peter Hanzen Wardenier, Erik Weber Jensen, Bernardo Kastrup +5 more	2021-02-09