Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11181829 | Method for determining a control parameter for an apparatus utilized in a semiconductor manufacturing process | Hakki Ergün Cekli, Simon Hendrik Celine Van Gorp, Chenxi Lin | 2021-11-23 |
| 11086229 | Method to predict yield of a device manufacturing process | Alexander Ypma, Simon Hendrik Celine Van Gorp, Chenxi Lin, Dag Sonntag, Hakki Ergün Cekli +9 more | 2021-08-10 |