Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11054813 | Method and apparatus for controlling an industrial process using product grouping | Alexander Ypma, Franciscus Godefridus Casper Bijnen, Richard Johannes Franciscus Van Haren, Weitian Kou | 2021-07-06 |
| 10996573 | Method and system for increasing accuracy of pattern positioning | Peter Ten Berge, Peter Hanzen Wardenier | 2021-05-04 |
| 10915689 | Method and apparatus to correct for patterning process error | Peter Ten Berge, Everhardus Cornelis Mos, Richard Johannes Franciscus Van Haren, Peter Hanzen Wardenier, Erik Weber Jensen +5 more | 2021-02-09 |