Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11036146 | Method and apparatus to reduce effects of nonlinear behavior | Richard Johannes Franciscus Van Haren, Everhardus Cornelis Mos, Peter Ten Berge, Erik Weber Jensen, Hakki Ergün Cekli | 2021-06-15 |
| 10996573 | Method and system for increasing accuracy of pattern positioning | Peter Ten Berge, David Deckers | 2021-05-04 |
| 10915689 | Method and apparatus to correct for patterning process error | Peter Ten Berge, Everhardus Cornelis Mos, Richard Johannes Franciscus Van Haren, Erik Weber Jensen, Bernardo Kastrup +5 more | 2021-02-09 |