Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11169547 | Gas-pulsing-based shared precursor distribution system and methods of use | Michael R. Rice, Joseph AuBuchon, Sanjeev Baluja, Alexander Fernandez, Ming Xu +4 more | 2021-11-09 |
| 11150120 | Low temperature thermal flow ratio controller | Michael Kutney | 2021-10-19 |
| 10943803 | Methods and assemblies for gas flow ratio control | Kevin Brashear, Dennis L. Demars, Zhiyuan Ye, Jaidev Rajaram, Marcel E. Josephson | 2021-03-09 |
| 10921827 | Pressure regulated flow controller | Ming Xu, Kenneth Le | 2021-02-16 |