Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 11150120 | Low temperature thermal flow ratio controller | Ashley M. Okada | 2021-10-19 | $109,516,000 |
| 11054184 | Methods and apparatus for processing a substrate to remove moisture and/or residue | — | 2021-07-06 | $60,527,000 |