Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11169547 | Gas-pulsing-based shared precursor distribution system and methods of use | Michael R. Rice, Sanjeev Baluja, Ashley M. Okada, Alexander Fernandez, Ming Xu +4 more | 2021-11-09 |
| 11110425 | Gas distribution plate for thermal deposition | Jared Ahmad Lee, Sanjeev Baluja, Dhritiman Subha Kashyap, Michael R. Rice | 2021-09-07 |
| 11049694 | Modular microwave source with embedded ground surface | James D. Carducci, Larry D. Elizaga, Richard Fovell, Philip Allan Kraus, Thai Cheng Chua | 2021-06-29 |
| 11017986 | Deposition radial and edge profile tunability through independent control of TEOS flow | Sanjeev Baluja, Yi Yang, Truong Van Nguyen, Nattaworn Boss Nunta, Tuan Nguyen +1 more | 2021-05-25 |