Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11017986 | Deposition radial and edge profile tunability through independent control of TEOS flow | Sanjeev Baluja, Truong Van Nguyen, Nattaworn Boss Nunta, Joseph AuBuchon, Tuan Nguyen +1 more | 2021-05-25 |
| 10885660 | Object detection method, device, system and storage medium | Shuchang Zhou, Peiqin Sun | 2021-01-05 |