Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11049694 | Modular microwave source with embedded ground surface | Joseph AuBuchon, James D. Carducci, Larry D. Elizaga, Philip Allan Kraus, Thai Cheng Chua | 2021-06-29 |
| 11043360 | Gas distribution plate assembly for high power plasma etch processes | James D. Carducci, Kenneth S. Collins, Kartik Ramaswamy, Michael R. Rice, Vijay D. Parkhe | 2021-06-22 |