| 11192323 |
Bonding structure of e chuck to aluminum base configuration |
Roger Alan Lindley |
2021-12-07 |
| 11179965 |
Electrostatic chuck optimized for refurbishment |
Kadthala Ramaya Narendrnath |
2021-11-23 |
| 11158526 |
Temperature controlled substrate support assembly |
Konstantin Makhratchev, Masanori Ono, Zhiqiang Guo |
2021-10-26 |
| 11127619 |
Workpiece carrier for high power with enhanced edge sealing |
Kartik Ramaswamy, Chunlei Zhang, Haitao Wang, Jaeyong Cho |
2021-09-21 |
| 11088005 |
Electrostatic chuck having thermally isolated zones with minimal crosstalk |
Konstantin Makhratchev, Jason C. Della Rosa, Hamid Noobakhsh, Brad L. Mays, Douglas A. Buchberger, Jr. |
2021-08-10 |
| 11043360 |
Gas distribution plate assembly for high power plasma etch processes |
James D. Carducci, Kenneth S. Collins, Kartik Ramaswamy, Michael R. Rice, Richard Fovell |
2021-06-22 |
| 10973088 |
Optically heated substrate support assembly with removable optical fibers |
— |
2021-04-06 |
| 10957572 |
Multi-zone gasket for substrate support assembly |
— |
2021-03-23 |
| 10903094 |
Electrostatic puck assembly with metal bonded backing plate for high temperature processes |
— |
2021-01-26 |
| 10904996 |
Substrate support with electrically floating power supply |
Travis Koh, Haitao Wang, Philip Allan Kraus, Daniel Distaso, Christopher A. Rowland +2 more |
2021-01-26 |
