Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11192323 | Bonding structure of e chuck to aluminum base configuration | Vijay D. Parkhe | 2021-12-07 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11192323 | Bonding structure of e chuck to aluminum base configuration | Vijay D. Parkhe | 2021-12-07 |